This value is a parameter specific to the Leitz interface. The value tells the CMM how carefully it should remain on the approach vector as the probe is moved into the part for a measurement.
With smaller values the difficulty for the machine to acquire the desired location increases. However, using a smaller value provides a more accurate measurement. This should normally be left at the default value.
Entry Name: MoveAccuracy
Entry Type: Real Number specified in MM. The default value is 0.1.